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Ukusetyenziswa kwemibhobho yegesi ecocekileyo kakhulu kwiinkqubo zobunjineli be-elektroniki

IProjekthi ye-909 iProjekthi Enkulu Kakhulu iFactory yeSekethe eDityanisiweyo yiprojekthi enkulu yokwakha yoshishino lwe-elektroniki lwelizwe lam ngexesha leSicwangciso seMinyaka emiHlanu sesithoba ukuvelisa iitshiphusi ezinobubanzi obuyi-0.18 microns kunye nobubanzi obuyi-200 mm.

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Itekhnoloji yokuvelisa yeesekethe ezihlanganisiweyo ezinkulu kakhulu azibandakanyi kuphela itekhnoloji echanekileyo efana ne-micro-machining, kodwa ibeka iimfuno eziphakamileyo kucoceko lwegesi.
Ubonelelo ngerhasi eninzi kwiProjekthi 909 lubonelelwa lishishini elidibeneyo phakathi kwePraxair Utility Gas Co., Ltd. yaseUnited States kunye namaqela afanelekileyo eShanghai ukuseka ngokudibeneyo indawo yokuvelisa igesi.Iziko lokuvelisa igesi likufuphi nomzi-mveliso weprojekthi ye-909. isakhiwo, esigubungela indawo emalunga ne-15,000 yeemitha zesikwere. Iimfuno zokucoceka kunye nemveliso yeegesi ezahlukeneyo

I-nitrogen ephezulu (PN2), i-nitrogen (N2), kunye ne-oksijeni ephezulu (PO2) iveliswa ngokuhlukana komoya. I-hydrogen ecocekileyo ephezulu (PH2) iveliswa yi-electrolysis. IArgon (Ar) kunye ne-helium (Yena) zithengwa ngaphandle. I-quasi-gas ihlanjululwe kwaye ihlungwe ukuze isetyenziswe kwiProjekthi ye-909. Igesi ekhethekileyo inikezelwa kwiibhotile, kwaye ikhabhinethi yebhotile yegesi ifumaneka kwi-workshop encedisayo yeplanti yokuvelisa isekethe edibeneyo.
Ezinye iigesi zikwabandakanya inkqubo ye-CDA yomoya ococekileyo owomileyo, kunye nomthamo wokusetyenziswa kwe-4185m3 / h, iqondo loxinzelelo lwamazolo -70 ° C, kunye nobukhulu beqhekeza elingekho ngaphezu kwe-0.01um kwigesi kwindawo yokusetyenziswa. Inkqubo yokuphefumula umoya (BA), umthamo wokusetyenziswa kwe-90m3 / h, i-pressure dew point 2 ℃, i-particle size kwi-gas kwindawo yokusetyenziswa ayikho enkulu kune-0.3um, inkqubo ye-vacuum (PV) inkqubo, umthamo wokusetyenziswa 582m3 / h, idigri yevacuum kwindawo yokusetyenziswa -79993Pa. Inkqubo yokucoca i-vacuum (HV), umthamo wokusetyenziswa kwe-1440m3 / h, idigri ye-vacuum kwindawo yokusetyenziswa -59995 Pa. Igumbi le-compressor yomoya kunye negumbi lokupompoza i-vacuum zombini zifumaneka kwindawo yeprojekthi yeprojekthi ye-909.

Ukukhethwa kwezinto zombhobho kunye nezixhobo
Irhasi esetyenziswa kwimveliso yeVLSI ineemfuno zococeko eziphezulu kakhulu.Imibhobho yegesi ecocekileyozidla ngokusetyenziswa kwiindawo ezicocekileyo zemveliso, kwaye ulawulo lwazo lokucoceka kufuneka luhambelane okanye luphakame kunomgangatho wokucoceka kwendawo esetyenziswayo! Ukongezelela, imibhobho yegesi ecocekileyo isoloko isetyenziswa kwiindawo ezicocekileyo zokuvelisa. I-hydrogen ecocekileyo (PH2), ioksijini ecocekileyo (PO2) kunye nezinye iigesi ezikhethekileyo ziyatsha, ziqhume, zixhase ukutsha okanye iigesi ezinetyhefu. Ukuba inkqubo yombhobho wegesi yenzelwe ngokungafanelekanga okanye izinto ezikhethiweyo zikhethwe ngokungafanelekanga, kungekhona nje ukucoceka kwegesi esetyenziswe kwindawo yegesi, kodwa kuya kuphumelela. Ihlangabezana neemfuno zenkqubo, kodwa ayikhuselekanga ukuyisebenzisa kwaye iya kubangela ungcoliseko kumzi-mveliso ococekileyo, okuchaphazela ukhuseleko kunye nokucoceka komzi-mveliso ococekileyo.
Isiqinisekiso somgangatho wegesi ecocekileyo kwindawo yokusetyenziswa akuxhomekeke kuphela ekuchanekeni kwemveliso yegesi, izixhobo zokuhlanjululwa kunye nezihlungi, kodwa zikwachatshazelwa kumlinganiselo omkhulu kwizinto ezininzi kwinkqubo yombhobho. Ukuba sithembele kwizixhobo zokuvelisa igesi, izixhobo zokucoca kunye nezihluzi Akulunganga nje ukumisela iimfuno ezichanekileyo ezingaphezulu ngokugqibeleleyo ukuhlawulela uyilo olungafanelekanga lwenkqubo yombhobho wegesi okanye ukukhetha izinto eziphathekayo.
Ngethuba lenkqubo yoyilo lweprojekthi ye-909, silandele "iKhowudi yoYilo lweZityalo ezicocekileyo" GBJ73-84 (umgangatho wangoku ngu (GB50073-2001)), "Ikhowudi yoYilo lweZikhululo zoMoya eziQinisekisiweyo" GBJ29-90, "Ikhowudi UYilo lweZikhululo ze-Oxygen" GB50030-91 , "Ikhowudi yoYilo lweZikhululo zeHydrogen kunye ne-Oxygen" GB50177-93, kunye nemilinganiselo yobugcisa efanelekileyo yokukhethwa kwezinto zombhobho kunye nezixhobo. "Ikhowudi yoYilo lweZityalo eziCocekileyo" ichaza ukukhethwa kwezinto zombhobho kunye neevalvu ngolu hlobo lulandelayo:

(1) Ukuba ucoceko lwegesi lukhulu okanye lulingana ne-99.999% kwaye indawo yombethe ingaphantsi kwe-76 ° C, 00Cr17Ni12Mo2Ti ipayipi yentsimbi ephantsi yekhabhoni ecocekileyo (316L) enodonga lwangaphakathi lwe-electropolished okanye i-OCr18Ni9 umbhobho wensimbi engenasici (304) kunye Udonga lwangaphakathi olufakwe i-electropolished kufuneka lusetyenziswe. Ivalve kufuneka ibe ivelufa yediaphragm okanye ivalve evungama.

(2) Ukuba ucoceko lwegesi lukhulu okanye lulingana ne-99.99% kwaye indawo yombethe ingaphantsi kwe -60 ° C, i-OCr18Ni9 ityhubhu yensimbi engenasici (304) enodonga lwangaphakathi lwe-electropolished kufuneka isetyenziswe. Ngaphandle kweevalvu ezivuthela ekufuneka zisetyenziselwe imibhobho yerhasi etshayo, iivalvu zebhola kufuneka zisetyenziselwe eminye imibhobho yegesi.

(3) Ukuba umbethe womoya owomileyo ocinezelweyo ungaphantsi kwe-70°C, kufuneka kusetyenziswe umbhobho wentsimbi engenakutyiwa i-OCr18Ni9 (304) enodonga lwangaphakathi olukhazimlisiweyo. Ukuba indawo yombethe ingaphantsi kwe -40 ℃, kufuneka kusetyenziswe umbhobho wentsimbi yentsimbi ye OCr18Ni9 (304) okanye umbhobho wentsimbi engenamthungo oshushu-diphu. Ivalve kufuneka ibe yivalve okanye ivalve yebhola.

(4) Isixhobo sevalve kufuneka sihambelane nombhobho wokudibanisa.

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Ngokweemfuno zeenkcukacha kunye nemilinganiselo yobugcisa efanelekileyo, siqwalasela le miba ilandelayo xa sikhetha izinto zombhobho:

(1) Ukungena komoya kwezinto zombhobho kufuneka kube kuncinci. Imibhobho yezinto ezahlukeneyo inomoya owahlukileyo. Ukuba imibhobho enomoya omkhulu wokungena umoya ikhethiwe, ukungcola akunakususwa. Imibhobho yensimbi engenasici kunye nemibhobho yobhedu ingcono ekukhuseleni ukungena kunye nokubola kwe-oksijini emoyeni. Nangona kunjalo, ekubeni imibhobho yensimbi engenasici ingasebenzi kakhulu kunemibhobho yobhedu, imibhobho yobhedu isebenza ngakumbi ekuvumeleni ukufuma okusemoyeni ukuba kungene kwindawo yayo engaphakathi. Ngoko ke, xa ukhetha imibhobho yeepayipi zegesi ezicocekileyo, iipayipi zensimbi ezingenasici kufuneka zibe zikhetho lokuqala.

(2) Umgangatho wangaphakathi wezinto zombhobho ubhengezwa kwaye unempembelelo encinci ekuhlalutyeni igesi. Emva kokuba umbhobho wensimbi engenasici ucutshungulwa, umlinganiselo othile wegesi uya kugcinwa kwi-lattice yayo yensimbi. Xa igesi ecocekileyo idlula, le nxalenye yegesi iya kungena emoyeni kwaye ibangele ungcoliseko. Ngexesha elifanayo, ngenxa ye-adsorption kunye nohlalutyo, isinyithi kwindawo yangaphakathi yombhobho nayo iya kuvelisa inani elithile lepowder, elibangela ukungcola kwigesi ephezulu. Kwiinkqubo zombhobho ngokucoceka ngaphezu kwe-99.999% okanye inqanaba le-ppb, kufuneka kusetyenziswe i-00Cr17Ni12Mo2Ti ipayipi ephantsi ye-carbon stainless steel pipe (316L).

(3) Ukumelana nokunxitywa kwemibhobho yentsimbi engenasici kubhetele kunemibhobho yobhedu, kwaye uthuli lwesinyithi oluveliswa kukukhukuliseka kokuhamba komoya luncinci. Iiworkshops zokuvelisa ezineemfuno eziphezulu zokucoceka zingasebenzisa i-00Cr17Ni12Mo2Ti i-carbon low carbon stainless steel pipes (316L) okanye i-OCr18Ni9 ipayipi yensimbi engenasici (304), imibhobho yobhedu ayiyi kusetyenziswa.

4Imibhobho ye-EP ecocekileyo kakhulukufuneka isetyenziswe. Coca “ityhubhu ecocekileyo enomgangatho ongaphakathi ogudileyo”.

(5) Ezinye zeenkqubo ezikhethekileyo zemibhobho yerhasi ezisetyenziswa kwinkqubo yokuvelisa ziigesi ezidla ngokutya kakhulu. Imibhobho kwezi nkqubo zemibhobho kufuneka isebenzise imibhobho yentsimbi engatyanga engatyanga njengemibhobho. Ngaphandle koko, imibhobho iya konakaliswa ngenxa yokubola. Ukuba amabala okudusa enzeka kumphezulu, imibhobho yentsimbi eqhelekileyo engenamthungo okanye imibhobho yentsimbi efakwe igalvanized welded ayisayi kusetyenziswa.

(6) Ngokomgaqo, lonke uqhagamshelo lwemibhobho yerhasi kufuneka ludityaniswe. Ekubeni i-welding ye-galvanized steel pipes iya kutshabalalisa i-galvanized layer, i-galvanized steel pipes ayisetyenziselwa imibhobho kumagumbi acocekileyo.

Ukuthathela ingqalelo le miba ingasentla, imibhobho yerhasi yoluhlu lwemibhobho kunye neevalvu ezikhethiweyo kwiprojekthi &7 & zimi ngolu hlobo lulandelayo:

Imibhobho yenkqubo ye-nitrogen ephezulu (PN2) yenziwe nge-00Cr17Ni12Mo2Ti i-low-carbon-stainless steel pipes (316L) kunye neendonga zangaphakathi ze-electropolished, kwaye iivalve zenziwe ngeentsimbi zentsimbi ezingenasici.
Imibhobho yenkqubo ye-nitrogen (N2) yenziwe nge-00Cr17Ni12Mo2Ti ye-carbon low-carbon stainless steel pipes (316L) kunye neendonga zangaphakathi ze-electropolished, kunye neevalvu zenziwe ngeentsimbi zentsimbi ezingenanto.
I-high-purity hydrogen (PH2) imibhobho yenkqubo yenziwe nge-00Cr17Ni12Mo2Ti i-low-carbon-stainless steel pipes (316L) kunye neendonga zangaphakathi ze-electropolished, kunye neevalvu zenziwe ngeentsimbi zentsimbi ezingenasici.
Imibhobho yenkqubo ye-oksijeni ephezulu (i-PO2) yenziwe nge-00Cr17Ni12Mo2Ti i-low-carbon-stainless steel pipes (316L) kunye neendonga zangaphakathi ze-electro-polished, kunye ne-valve zenziwe ngeentsimbi ze-bellows zensimbi ezingenasici.
Imibhobho ye-Argon (Ar) yenkqubo yenziwe nge-00Cr17Ni12Mo2Ti i-low-carbon-stainless steel pipes (316L) kunye neendonga zangaphakathi ze-electropolished, kunye ne-stainless steel bellows valves yezinto ezifanayo zisetyenziswa.
Imibhobho yenkqubo ye-helium (He) yenziwe nge-00Cr17Ni12Mo2Ti i-low-carbon-stainless steel pipes (316L) kunye neendonga zangaphakathi ze-electropolished, kunye neevalvu zenziwe ngeentsimbi zentsimbi ezingenanto kunye nezixhobo ezifanayo.
Imibhobho yenkqubo yomoya ococekileyo owomileyo (CDA) yenziwe nge-OCr18Ni9 imibhobho yensimbi engenasici (304) eneendonga zangaphakathi ezikhazimlisiweyo, kwaye iivalvu zenziwe ngeevalvu zentsimbi engenasici.
Imibhobho yenkqubo yokuphefumula yomoya (BA) yenziwe nge-OCr18Ni9 ipayipi yensimbi engenasici (304) eneendonga zangaphakathi ezipholileyo, kwaye iivalve zenziwe ngeevalvu zebhola zensimbi ezingenasici zesixhobo esifanayo.
Inkqubo ye-vacuum vacuum (PV) imibhobho yenkqubo yenziwe ngemibhobho ye-UPVC, kwaye iivalve zenziwe ngeevalvu zebhabhathane zevacuum ezenziwe ngezinto ezifanayo.
Imibhobho yokucoca i-vacuum (HV) yenziwe ngemibhobho ye-UPVC, kwaye iivalve zenziwe ngeevalve ze-butterfly vacuum ezenziwe ngezinto ezifanayo.
Imibhobho yenkqubo yegesi ekhethekileyo yenziwe yonke i-00Cr17Ni12Mo2Ti i-low-carbon-stainless steel pipes (316L) kunye neendonga zangaphakathi ze-electropolished, kwaye iivalve zenziwe ngeentsimbi zentsimbi ezingenasici.

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3 Ukwakhiwa kunye nokufakelwa kwemibhobho
3.1 ICandelo 8.3 “leKhowudi yoYilo lweZakhiwo ezicocekileyo” limisela la malungiselelo alandelayo oqhagamshelo lwemibhobho:
(1) Uqhagamshelo lwemibhobho kufuneka ludityaniswe, kodwa imibhobho yentsimbi eyenziwe ngesinyithi eshushu idiphu kufuneka ifakwe imisonto.
(2) Imibhobho yentsimbi engenastainless kufuneka idityaniswe nge-argon arc welding kunye ne-butt welding okanye i-socket welding, kodwa imibhobho yegesi ecoceke kakhulu ifanele idityaniswe nge-welding ye-butt ngaphandle kwamanqaku kudonga lwangaphakathi.
(3) Ukudityaniswa kwemibhobho kunye nesixhobo kufuneka kuhambelane neemfuno zoqhagamshelo lwesixhobo.Xa usebenzisa uqhagamshelo lombhobho, kufuneka kusetyenziswe imibhobho yentsimbi.
(4) Ukudityaniswa kwemibhobho kunye neevalvu kufuneka kuhambelane nale migaqo ilandelayo

① Izinto zokutywina ezidibanisa imibhobho yerhasi yococeko oluphezulu kunye neevalvu kufuneka zisebenzise iigasket zentsimbi okanye iiferrules ezimbini ngokweemfuno zenkqubo yokuvelisa kunye neempawu zerhasi.
②Isixhobo sokutywina kwintambo ephothiweyo okanye yeflange kufuneka ibe yipolytetrafluoroethylene.
3.2 Ngokweemfuno zeenkcukacha kunye nemilinganiselo yobugcisa echaphazelekayo, ukudityaniswa kwemibhobho yegesi ecocekileyo kufuneka kufakwe i-welded kangangoko kunokwenzeka. Ukuwelda ngokuthe ngqo kwe-butt kufuneka kugwenywe ngexesha le-welding. Imikhono yombhobho okanye amalunga agqityiweyo kufuneka asetyenziswe. Imikhono yombhobho kufuneka yenziwe ngezinto ezifanayo kunye nokugudiswa kwendawo yangaphakathi njengemibhobho. kwinqanaba, ngexesha le-welding, ukwenzela ukuthintela i-oxidation yenxalenye ye-welding, i-gas ecocekileyo yokukhusela kufuneka ifakwe kwi-welding pipe. Kwimibhobho yensimbi engenasici, i-argon arc welding kufuneka isetyenziswe, kunye negesi ye-argon yobunyulu obufanayo kufuneka ifakwe kumbhobho. Uqhagamshelo olunemisonto okanye uqhagamshelo lwentambo kufuneka lusetyenziswe. Xa udibanisa iiflange, ii-ferrules kufuneka zisetyenziselwe ukudibaniswa kwentambo. Ngaphandle kwemibhobho ye-oksijeni kunye nemibhobho ye-hydrogen, ekufuneka isebenzise i-gaskets yensimbi, ezinye iipayipi kufuneka zisebenzise i-polytetrafluoroethylene gaskets. Ukusebenzisa i-rubber ye-silicone encinci kwi-gaskets kuya kusebenza kwakhona. Yandisa isiphumo sokutywinwa. Amanyathelo afanayo kufuneka athathwe xa udibaniso lwe-flange lwenziwa.
Ngaphambi kokuba umsebenzi wofakelo uqale, uhlolo olucacileyo lwemibhobho,izixhobo, iivalve, njl njl. kufuneka zenziwe. Udonga lwangaphakathi lwemibhobho yentsimbi eqhelekileyo kufuneka icocwe ngaphambi kokufakwa. Imibhobho, izifakelo, iivalvu, njl.
Ngaphambi kokuba inkqubo ifakwe kwaye isetyenziswe, inkqubo yombhobho yokuhambisa kunye nokusabalalisa kufuneka ihlanjululwe ngokupheleleyo ngegesi ephezulu yokucoca. Oku akugcini nje ukuvuthela amasuntswana othuli awele ngengozi kwinkqubo ngexesha lofakelo, kodwa idlala indima yokomisa kwinkqubo yombhobho, ukususa inxalenye yerhasi equlethe ukufuma efunnwe ludonga lombhobho kunye nezinto zombhobho.

4. Uvavanyo loxinzelelo lwepayipi kunye nokwamkelwa
(1) Emva kokufakelwa kwenkqubo, ukuhlolwa ngeradiographic nge-100% kwimibhobho ehambisa ulwelo olunetyhefu kakhulu kwimibhobho yegesi ekhethekileyo iya kwenziwa, kwaye umgangatho wayo awuyi kuba ngaphantsi kweNqanaba II. Eminye imibhobho iya kuxhomekeka kwisampulu yokuhlolwa kweradiographic, kwaye umlinganiselo wokuhlolwa kwesampulu awuyi kuba ngaphantsi kwe-5 %, umgangatho awuyi kuba ngaphantsi kwebakala III.
(2) Emva kokuphumelela ukuhlolwa okungonakalisi, uvavanyo loxinzelelo kufuneka lwenziwe. Ukuze kuqinisekiswe ukoma kunye nokucoceka kwenkqubo yombhobho, uvavanyo loxinzelelo lwe-hydraulic akufanele luqhutywe, kodwa uvavanyo loxinzelelo lwe-pneumatic kufuneka lusetyenziswe. Uvavanyo loxinzelelo lomoya kufuneka luqhutywe kusetyenziswa i-nitrogen okanye umoya oxinyiweyo ohambelana nenqanaba lokucoceka kwegumbi elicocekileyo. Uxinzelelo lovavanyo lombhobho kufuneka lube ngamaxesha angama-1.15 kuxinzelelo loyilo, kwaye uxinzelelo lovavanyo lombhobho wokufutha kufuneka lube yi-0.2MPa. Ngethuba lovavanyo, uxinzelelo kufuneka lube ngokuthe ngcembe kwaye lunyuke ngokukhawuleza. Xa uxinzelelo lwenyuka ukuya kwi-50% yoxinzelelo lovavanyo, ukuba akukho nto ingaqhelekanga okanye ukuvuza kufunyenwe, qhubeka nokunyusa inyathelo loxinzelelo ngesinyathelo nge-10% yoxinzelelo lovavanyo, kwaye uzinzise uxinzelelo lwemizuzu emi-3 kwinqanaba ngalinye kude kube uxinzelelo lovavanyo. . Zinzise uxinzelelo lwemizuzu eyi-10, emva koko unciphise uxinzelelo kuxinzelelo loyilo. Ixesha lokumisa uxinzelelo kufuneka limiselwe ngokweemfuno zokubona ukuvuza. I-arhente yogwebu ifanelekile ukuba akukho kuvuza.
(3) Emva kokuba inkqubo ye-vacuum iphumelele uvavanyo loxinzelelo, kufuneka iphinde iqhube uvavanyo lwe-vacuum yeeyure ze-24 ngokuhambelana namaxwebhu oyilo, kwaye izinga loxinzelelo akufanele libe ngaphezu kwe-5%.
(4) Uvavanyo lokuvuza. Kwiinkqubo zemibhobho yomgangatho we-ppb kunye ne-ppt, ngokweenkcukacha ezifanelekileyo, akukho kuvuza kufuneka kuthathwe njengokufanelekileyo, kodwa uvavanyo lwexabiso lokuvuza lusetyenziswa ngexesha loyilo, oko kukuthi, uvavanyo lwexabiso lokuvuza lwenziwa emva kovavanyo lokuqina komoya. Uxinzelelo luxinzelelo lokusebenza, kwaye uxinzelelo lumisiwe kwiiyure ze-24. Umndilili wokuvuza ngeyure ungaphantsi okanye ulingana ne-50ppm njengoko ufanelekile. Ubalo lokuvuza ngolu hlobo lulandelayo:
A=(1-P2T1/P1T2)*100/T
Kwifomula:
Ukuvuza kweyure (%)
P1-Uxinzelelo olupheleleyo ekuqaleni kovavanyo (Pa)
I-P2-Uxinzelelo olupheleleyo ekupheleni kovavanyo (Pa)
T1-absolute ubushushu ekuqaleni kovavanyo (K)
T2-absolute ubushushu ekupheleni kovavanyo (K)


Ixesha lokuposa: Dec-12-2023