Ukufuma kunye nokuphuma kwegesi kwi-particle: Indlela ukugqitywa komphezulu okuchaphazela ngayo ukucoceka kwegesi

Kwiinkqubo zegesi ezicocekileyo kakhulu zanamhlanje, umahluko phakathi kwenkqubo enenzuzo kunye nokusilela okubiza kakhulu kudla ngokuxhomekeka kwinto ongenakuyibona. Ukufuma kunye namasuntswana - alinganiswa ngamasuntswana ngebhiliyoni okanye kwanangamasuntswana ngetriliyoni - anokungcolisa umjelo wegesi ngokuzolileyo, onakalise umgangatho wemveliso, kwaye avale imigca yemveliso ye-semiconductor. Ngelixa izixhobo zokuhluza, zokucoca, kunye nokulawula ukuhamba kwamanzi zifumana uninzi lwengqwalasela, enye yezona mpembelelo ziphambili kubunyulu begesi ngumphezulu wetyhubhu ethwala igesi. Indlela loo mphezulu ogqityiwe ngayo imisela ukuba ingakanani imswakama enokuyifunxa, zingaphi iisuntswana enokuyibamba, kwaye ingakanani igesi enokuyikhupha kuyo yonke inkqubo. Esi sikhokelo sichaza iindlela zokukhupha umswakama kunye namasuntswana, sibala impembelelo yokugqitywa komphezulu kubunyulu begesi, kwaye sichaza amaqhinga okugqiba kunye nokusebenza asetyenziswayo ukunika ukusebenza kobunyulu obuphezulu kakhulu (UHP).

Kuthetha ukuthini ukugculela kwaye kutheni kubalulekile?

Ukukhupha igesi kukukhululwa kancinci kancinci kweegesi kunye nokufuma okuye kwafunxwa okanye kwafunxwa kumphezulu wento okanye kwanyibilika ngaphakathi kweengqimba zayo ezikufutshane nomphezulu. Ukukhululwa kubangelwa xa uxinzelelo olujikelezileyo luyehla, ubushushu bunyuka, okanye igesi yokucoca idlula kumphezulu - kanye iimeko ezifumaneka kwiinkqubo zokuhambisa igesi, amagumbi okucoca, kunye nezixhobo zohlalutyo. Kwiinkqubo zentsimbi engagqwaliyo, umphunga wamanzi ngowona ungcolisi uqhelekileyo wokukhupha igesi, ulandelwa zii-hydrocarbons kunye neentsalela zenkqubo ezisele.

Nokuba kumanqanaba abonakala engengowaneleyo, ukufuma kunokusabela kwiigesi ezikhethekileyo, ii-nucleate particles, kuguqule ukufundwa kohlalutyo ngendlela engeyiyo, kwaye kuthintele iityhefu ezifana nezilawuli zokuhamba kobuninzi, iivalvu, kunye namagumbi okubeka izinto. Njengoko izixhobo zincipha kwaye zisebenza iifestile ziqina, ishishini le-semiconductor liye latyhala iimfuno zococeko lwegesi ukusuka kwiindawo ngesigidi (ppm) ukuya kwiindawo ngebhiliyoni (ppb) kunye neendawo ngetriliyoni (ppt). Kule migangatho, ukugqitywa komphezulu wetyhubhu akusengolwazi luncinci - yinkcazo ephambili ekufuneka yenziwe, iqinisekiswe, kwaye igcinwe ukusuka kwisixhobo sokugaya ukuya kwisixhobo.

Iindlela Eziphambili

Ukwanda koMphezulu wokwenyani

Umphezulu orhabaxa unendawo enkulu kakhulu encinci kuneyogudileyo, kwaye indawo engaphezulu ithetha iindawo ezininzi apho umswakama unokunamathela khona. Ubudlelwane abuyonto icwangcisiweyo: uburhabaxa ngendlela yeencopho, iintlambo, kunye namanyathelo omda weenkozo kwandisa indawo yomphezulu esebenzayo ekhoyo yokufunxa. Ukunciphisa uburhabaxa bomphezulu - okulinganiswa njengeRa, ukuphambuka okuphakathi kwezibalo kwiprofayili yomphezulu - ukusuka kwi-0.8 µm ukuya kwi-0.25 µm kunokususa isabelo esikhulu seendawo zokufunxa, kuba iindawo ezinzulu, ezigcina amanzi ngenkani, zisuswa ngokupheleleyo. Yingakho ukugqitywa komphezulu kudla ngokuchazwa njengomthombo ofihlakeleyo womswakama omisela ukuba inkqubo kufuneka ihlanjululwe ixesha elingakanani ngaphambi kokuba ifikelele kubumsulwa obusisiseko.

Ukufunxwa komswakama kunye nokuphuma kwegesi

Umswakama wenza iibhondi ezizinzileyo kunye nomphezulu wesinyithi, ngakumbi ngeengqimba ze-oxide ezikhula ngokwendalo kwintsimbi engagqwaliyo. Kumphezulu ongenanto, otyebileyo kwi-chromium, iimolekyuli zamanzi ziqala nge-chemisorb ngqo kwi-oxide, zize zakheke njengeengqengqelo ezilandelelanayo ze-physisorbed. Xa ityhubhu kamva ivezwa kwi-vacuum okanye igesi egelezayo, ezi ngqimba ziphuma kancinci kancinci: iingqimba zangaphandle ezibotshelelweyo ziphuma kuqala, ngelixa amanzi e-chemisorbed eqhubeka kwaye afuna amandla, adla ngokuba ngohlobo lobushushu, ukuze akhutshwe. Isiphumo esisebenzayo kukuba ityhubhu esandula ukufakwa okanye egqityiwe kakubi iya kuchitha umswakama kumjelo wegesi kangangeeyure okanye iintsuku, yandise ixesha lokucoca kwaye igcine ubunyulu bungaphantsi kwemilinganiselo.

Ukuvalelwa Kwamasuntswana

Iikroskopu, imingxunya, kunye nemingxunya kwiindawo ezirhabaxa zisebenza njengeendawo zokugcina amasuntswana. Ngexesha lokusebenza okuqhelekileyo la masuntswana asenokuhlala evalelekile, kodwa ukujikeleza kobushushu, ukungcangcazela, okanye utshintsho olukhawulezileyo kwicala lokuhamba kunye nesantya kunokuwakhupha, kuthumele ukungcola kumjelo wegesi. Kwimveliso ye-semiconductor, isuntswana elinye lingenza isiphene esibulalayo kwi-wafer, kwaye amasuntswana ahlala kwimilenze efileyo okanye kwimingxunya yevalvu ayaziwa ngokuba nzima ukuwasusa xa inkqubo isebenza. Iindawo ezigudileyo, ezingenamingxunya azinciphisi nje kuphela inani lamasuntswana aveliswayo, kodwa zenza neendawo ezihlala zilula ukuzicoca nokuziqinisekisa.

Impembelelo ekucocekeni kwegesi

Ukukhetha ukugqitywa komphezulu kunempembelelo ethe ngqo, enokulinganiselwa kubunyulu begesi, ixesha lokucoca, kunye nokuzinza kwexesha elide. Iindawo ezirhabaxa kuluhlu lweRa 0.5–0.8 µm — oluqhelekileyo kwityhubhu etsalwa ngokubandayo engacocwanga — zigcina umswakama kunye namasuntswana amaninzi. Ziphuma ngamandla kakhulu kwigesi, zifuna amaxesha amade okucoca, kwaye ngokubanzi zifanelekile kuphela kwizicelo zenqanaba le-ppm apho ungcoliseko ngamanye amaxesha lwamkelekile. Iindawo ezithambileyo kuluhlu lweRa ≤ 0.25 µm, ezivame ukuveliswa yi-electropolishing (EP), ziziphatha ngendlela eyahlukileyo kakhulu: zibonelela ngeendawo ezimbalwa zokufunxa, ukukhupha igesi kancinci, kunye nokuveliswa kwamasuntswana amancinci kakhulu. Isiphumo silinganisiwe kwizifundo ezipapashiweyo; uphando olunye malunga ne-titanium lubonise ukuba ukuncipha kwama-35% kuburhabaxa bomphezulu kuvelise ukwehla kwama-30% kumanzi aphuma kwigesi, kwaye iindlela ezifanayo zibhaliwe kwintsimbi engagqwaliyo. Kwiinkqubo zokucoca okuphezulu kwe-ppb kunye ne-ppt-level, iindawo ezipholishwe nge-electropolishing aziyonto iphambili — ziyimfuneko.

Indlela Ukugqitywa Komphezulu Okuchaphazela Ngayo Ukusebenza Kwenkqubo

Ukugqitywa komphezulu kunefuthe elikhulu kunokukhupha igesi. Kuchaphazela ixesha lokucoca (iindawo ezigudileyo zifikelela kumswakama osisiseko ngokukhawuleza), ukuchitheka kwamasuntswana phantsi kokuhamba kwamanzi, ukumelana nokugqwala (iindawo ze-EP eziphuculweyo, ezityebileyo kwi-chromium ziyamelana nokungcoliswa), kunye nokucoceka (iindawo ezigudileyo zikhupha izinto zokucoca kwaye zihlambe amanzi ngokupheleleyo). Kukwachaphazela ukudityaniswa: ukugqitywa komphezulu okucocekileyo nokulawulwayo kuvelisa umgangatho wokudityaniswa kwe-orbital ohambelanayo, kunciphisa umngcipheko wokufakwa kunye nokutshintsha kombala wobushushu okunokuba yimithombo yongcoliseko kwixesha elizayo.

Amaqhinga okunciphisa ingxaki

Ukufezekisa nokugcina ubunyulu obuphezulu begesi kufuna indibaniselwano yeendlela, nganye ijongana nendlela eyahlukileyo yongcoliseko.

Unyango Lomphezulu

Ukucoca nge-electropolishing (EP) ngumgangatho olungileyo kwiinkqubo ze-UHP. Le nkqubo isusa umaleko omncinci, olawulwayo wesinyithi kumphezulu, ilinganise iincochoyi ezincinci, ivula kwaye isuse imingxunya, kwaye ityebisa umxholo we-chromium wefilimu engasebenziyo - nto leyo eyenza umphezulu ungangeni kumhlwa kwaye ungagcini manzi kakhulu. Xa ucacisa uloliwe wegesi we-UHP, khethaityhubhu engenamthungo epholishiweyo nge-electropolishedkwizixhobo ezimanzi kunye nezinto ezihambelanayo ezifikelela kwisiphelo esifanayo; ukuxuba izinto ezigqityiweyo ngaphakathi kwenkqubo enye kuyawuphazamisa ucoceko lwendibano yonke. Kwizicelo ezingabizi kakhulu, i-acid pickling kunye ne-passivation (AP) kunye ne-bright annealing (BA) zibonelela ngokulinganisela okuhle kococeko kunye neendleko.

Ukucoca nokuphatha

Ukugqitywa komphezulu wodwa akwanelanga — ukucoca ngokungqongqo kususa iintsalela zokuvelisa, iioyile, kunye nokufuma okushiyekileyo kumanyathelo okucubungula kwangaphambili. Iindlela eziqhelekileyo zidibanisa ukususwa kwe-alkaline, ukucoca nge-ultrasound, kunye nokuhlamba ngamanzi acocekileyo, kulandele ukomisa kwindawo ecocekileyo kunye nokupakisha kwindawo evaliweyo, enezingxobo ezimbini. Ukuphatha ingqeqesho kubaluleke ngokufanayo: iiglavu, izixhobo ezicocekileyo, kunye nendawo yokugcina egqunyiweyo kuthintela ukungcoliswa phakathi kwesixhobo sokusila kunye nokufakelwa kokugqibela.

Ukubhaka ngaphandle

Izinto zokufudumeza phantsi kwe-vacuum okanye igesi yokucoca egelezayo ikhawulezisa ukufunxwa komphunga wamanzi, isusa umswakama obungaphuma kwigesi ungene kumsinga wenkqubo ngexesha lokusebenza. Ukubhaka ngaphandle kubaluleke kakhulu kwiivalvu, izixhobo, kunye namalungu adibeneyo, apho i-geometry kunye neendawo ezichaphazelekileyo bubushushu zenza iindawo zokugcina umswakama ezifihlakeleyo. Xa zidityaniswe nokucoca ngaphandle, ukubhaka ngaphandle kunokunciphisa ixesha elifunekayo kwinkqubo entsha ukufikelela kubumsulwa obusisiseko ukusuka kwiintsuku ukuya kwiiyure.

Ukukhupha

Ukuntywila kwegesi engangeniyo, ngesiqhelo i-nitrogen okanye i-argon, kwinkqubo kukhupha izinto ezingcolisayo eziphuma kwigesi kwaye kuthintela umswakama ukuba ungaphindi ufunxeke. Ukucoca linyathelo eliya phambili kwaye liyaqhubeka: iinkqubo eziyilwe kakuhle zigcina ukucoca okuphantsi okuqhubekayo kwiindawo ezilindileyo kwaye zisebenzisa igesi yokucoca ecocekileyo kakhulu ukuze ukucoca ngokwako kungabi ngumthombo wongcoliseko.

Ukukhetha Izinto

Ukusebenzisa izinto ezikhupha igesi kancinci kunciphisa imithombo yongcoliseko lwangaphakathi ngaphambi kokuba zibekho. Kwinkonzo ye-UHP, intsimbi engagqwaliyo ye-316L eveliswe yi-VIM-VAR (i-vacuum induction melting elandelwa yi-vacuum arc remelting) ngumgangatho weshishini: ukunyibilika kwe-vacuum kabini kunciphisa ukufakwa kwesinyithi kwaye kuvelisa isakhiwo esixineneyo, esifana ngokulula ukugqiba ngokucocekileyo kwaye esingafane siphume kwigesi. Izinto ezikumgangatho ophantsi ezinee-inclusions zinokoyisa nokugqitywa komphezulu ongcono, kuba ii-inclusions zisebenza njengeendawo zokuqalisa ii-pit kunye nokuveliswa kwee-particles.

Ukukhetha isiphelo esifanelekileyo somphezulu kwisicelo sakho

Amashishini kunye neenkqubo ezahlukeneyo zinemfuno ezahlukeneyo zobumsulwa, kwaye ukugqitywa ngokuchanekileyo kulungelelanisa ucoceko ngokuchasene neendleko kunye nokufumaneka. Kwizicelo apho ubumsulwa benqanaba le-ppb kwanele - umzekelo, imigca yenkqubo yobumsulwa obuphezulu kunye neenkonzo zamayeza - aityhubhu engenamthungo eqaqambileyo efakwe i-annealed (BA)Ibonelela ngokulinganisela okugqwesileyo komgangatho womphezulu, ulawulo olulinganayo, kunye neendleko. Kwinkonzo enzima kakhulu, izinto ezicociwe ngombane zichazwe ngaphandle kokuphazamiseka.

• Ukwenziwa kwe-semiconductor kunye ne-flat-panel: Ukugqitywa kwe-EP, i-Ra ≤ 0.25 µm, i-316L VIM-VAR, ineebhegi ezimbini kwaye iqinisekiswe yi-batch. Uhlahlo-lwabiwo mali lwe-Outgassing kunye ne-particle luchazwe kwi-ppb-ppt kwaye lunyanzeliswa ngeenkcukacha zomphezulu kunye ne-particle-count.
• Iigesi ezikhethekileyo neze-elektroniki: Iityhubhu ze-EP okanye ze-BA ezikumgangatho ophezulu ezinesiphelo sangaphakathi esilawulwayo; iikhabhathi zegesi kunye neephaneli zokusasaza zifuna umgangatho ohambelanayo kuzo zonke izinto.
• Amayeza kunye ne-biotech: Iindawo ze-EP okanye ze-BA ezilula ukuzicoca nokuziqinisekisa, ezihlangabezana nezikhokelo zokugqitywa komphezulu we-ASME BPE kunye nokuxhasa imijikelo ye-CIP/SIP.
• Izixhobo zohlalutyo kunye ne-gas chromatography:ityhubhu yezixhoboenokugqitywa okulawulwayo ngaphakathi kobubanzi kunye nokunyamezelana okuchanekileyo, kuba uzinzo lwesignali luxhomekeke kwigesi yokuthwala ephinda-phindayo, engenangcolisi.
• Inkqubo ngokubanzi kunye nemibhobho yemizi-mveliso: Ukugqitywa kwe-AP okanye i-BA kubonelela ngococeko olufanelekileyo lwenkonzo yenqanaba le-ppm ngexabiso eliphantsi.

Imigangatho kunye neenkcukacha zoshishino

Ukucacisa ukugqitywa komphezulu ngokuchanekileyo kufuna ulwimi oluqhelekileyo. I-Ra (i-arithmetic mean roughness) yeyona parameter isetyenziswa kakhulu, kodwa izicelo ezibalulekileyo zikwabhekisa kwi-Rz, i-Rmax, kunye nenani le-peak, kunye nemigangatho yokulinganisa uburhabaxa bomphezulu efana ne-SEMI F19. Kwimibhobho yentsimbi engagqwaliyo, iireferensi eziqhelekileyo ziquka i-ASTM A269 kunye ne-A270 kwityhubhu engenamthungo necocekileyo, i-ASME BPE yezixhobo ze-bioprocessing, kunye nemigangatho ye-SEMI yezicelo ze-semiconductor. Xa inkcazo ifuna umgangatho we-EP, kufuneka ichaze ixabiso le-Ra, indlela yokulinganisa, kunye nemigangatho yokwamkelwa - umzekelo, "i-Ra ≤ 0.25 µm, ilinganiswa yi-stylus profilometry kumphezulu wangaphakathi, ihlolwe kwaye yaqinisekiswa yi-100%."

Imibuzo ebuzwa qho

Q: Lithini ixabiso le-Ra elithathwa njengenqanaba le-UHP?

A: Iinkqubo zokucoca eziphezulu kakhulu zihlala zichaza iRa ≤ 0.25 µm, kwaye uninzi lwee-semiconductor fabs zifuna iRa ≤ 0.13 µm kwiindawo ezipholishiweyo ngombane. Imfuneko echanekileyo ixhomekeke kwinkqubo kunye nodidi lokucoca olunikezelwayo.

Q: Ngaba i-electropolishing isusa amasuntswana?

A: Ukucoca nge-electropolishing kususa umaleko wesinyithi olawulwayo, osusa ii-micro-peaks, ii-laps, kunye neengxondorha apho amasuntswana kunye nokufuma kufihlakala khona. Akuthathi indawo yokucoca: indawo epholishwe nge-electropolished ngokufanelekileyo kufuneka icocwe, ihlanjwe, kwaye ipakishwe phantsi kweemeko zegumbi elicocekileyo.

Q: Ukugqitywa komphezulu kulichaphazela njani ixesha lokucoca?

A: Iindawo ezirhabaxa zigcina umswakama omninzi kwaye ziwukhulula kancinci, ngoko ke ukufikelela kubunyulu obusisiseko kuthatha ixesha elide. Iindawo ezigudileyo ezicociwe ngombane zinokunciphisa ixesha lokucoca ngeeyure okanye iintsuku, nto leyo ethetha ngokuthe ngqo kwiinkampani eziqalayo ezikhawulezayo kunye nexesha elincinci lokungasebenzi.

Q: Ingaba ityhubhu eqaqambileyo efakwe i-annealed (BA) yanele kwiinkqubo zegesi?

A: Ityhubhu ye-BA eneRa emalunga ne-0.25–0.4 µm ifanelekile kwiintlobo ezininzi zezicelo zokucoca okuphezulu kunye nezamayeza. Kwinkonzo ye-ppb–ppt semiconductor kunye ne-specialty-gas, kufuneka i-electropolishing ngokubanzi.

Q: Zeziphi izinto ezifanelekileyo kwiinkqubo zegesi ezicocekileyo kakhulu?

A: Intsimbi engagqwaliyo engama-316L eveliswa kukunyibilika kweVIM-VAR yeyona ndlela iqhelekileyo yokukhetha iinkqubo zegesi ze-UHP ngenxa yokuba ayinayo i-integration eninzi kwaye ayiguquguquki, icocekile.

Isiphelo

Ukugqitywa komphezulu akusiyonto yokuhombisa yetyhubhu yentsimbi engagqwaliyo — yinkcazo esebenzayo elawula ukufunxwa komswakama, ukugcinwa kwamasuntswana, kunye nokuphuma kwegesi kuyo yonke imihla yenkqubo yegesi. Ukugqitywa komphezulu okugudileyo kuyimfuneko yokufezekisa nokugcina amanqanaba aphezulu okucoceka kwegesi. Ngokuchaza ukugqitywa okufanelekileyo — okucociweyo nge-electropolish kwinkonzo ye-UHP, okukhanyayo okanye okufakwe i-pickled kunye nokungafakwanga kwizicelo ezingafunekiyo — ukuyidibanisa nezinto ezikhupha igesi eziphantsi ezifana ne-316L VIM-VAR stainless steel, kunye nokuyixhasa ngokucoca okungqongqo, ukubhaka, kunye neendlela zokucoca, iinjineli zingakha iinkqubo zokuhambisa igesi ezihlangabezana neenjongo zococeko ezifuna kakhulu ngokuthembekileyo kwaye zigcine apho ubomi besityalo.