Kutheni le nto iinkqubo zokuhambisa igesi ze-UHP zibaluleke kangaka?
Kwimveliso ye-semiconductor—iinkqubo ezifana nokugrumba, i-CVD, ukufakwa kwee-ion, kunye ne-lithography—iigesi zenkqubo kufuneka zibe nobunyulu obuphezulu kakhulu, ngesiqhelo ziyi-99.9999% (6N) okanye i-99.99999% (7N). Kwanezingcolisi ezincinci kwinqanaba le-ppb (iinxalenye ngebhiliyoni) okanye i-ppt (iinxalenye ngetriliyoni)—ezifana nokufuma okanye ioksijini—zinokubangela iziphene ezibulalayo ezifana nokuncitshiswa kwe-gate oxide, i-metallic voids, okanye ii-short circuits kwii-wafers, ezinokususa yonke indawo.
Injongo yenkqubo yokuhambisa igesi ye-UHP kukuthutha iigesi ukusuka kumthombo ukuya kwisixhobo senkqubo ngaphandle kokuwohloka kobunyulu, ukuthintela ungcoliseko kunye nokuvuza kuyo yonke indawo.
Kutheni i-EP Tubing Iba Ngumqolo Weenkqubo ze-UHP?
Ityhubhu ye-EP (eyenziwe nge-electropolished) yenziwe ngentsimbi engatyiwayo edlula kwinkqubo yokupholisha nge-electrochemical, nto leyo evelisa umphezulu wangaphakathi ofana nesipili. Oku kuyenza ibe “yi-artery” ebalulekileyo yokusasazwa kwegesi ye-UHP.
Ucoceko Olupheleleyo - Uthintelo Kumthombo
Ukulungiswa kwe-EP kunciphisa uburhabaxa bomphezulu wangaphakathi (Ra) ukuya kwi-0.13 µm – 0.25 µm okanye ngaphantsi. Olu gqibelo lugudileyo kakhulu lususa imingxunya emincinci kunye neendawo zokufunxa, kungabikho ndawo yokuba amasuntswana, ii-ion zesinyithi, okanye ukufuma kunamathele.
Ukumelana Nokugqwala Okuphuculweyo – Ukugcinwa Kobumsulwa
Inyathelo lokupholisha nge-electropolishing lisusa ukungcola okungaphezulu komhlaba kwaye lenze umaleko ongasebenziyo otyebileyo nge-chrome-oxide, ophucula kakhulu ukumelana neegesi ezirhabaxa ezifana ne-Cl₂, i-CF₄, kunye ne-HCl. Oku kuthintela ukugqwala kodonga lwemibhobho okunokubangela iinxalenye okanye ungcoliseko oluphuma kwigesi.
Ukuphucula Ukusebenza Kokuhamba Kombhobho kunye Nokucoca Okukhawulezileyo
Udonga olungaphakathi olugudileyo lunciphisa ukumelana nokuhamba kwamanzi kwaye lukhawulezisa ukucocwa kwenkqubo kunye nokutshintshwa kwegesi. Kwiinkqubo ezifuna ukutshintsha ngokukhawuleza igesi, oku kunciphisa amaxesha okujikeleza kwaye kwandisa amandla okuhambisa amanzi.
Izinto zePremium – Umgangatho “weCrown”
Iityhubhu ze-EP ezisemgangathweni ophezulu zenziwe ngentsimbi engagqwaliyo ye-316L VIM-VAR (Vacuum Induction Melting + Vacuum Arc Remelting). Le nkqubo yokunyibilika kabini iqinisekisa ubunyulu obukhulu besinyithi esisisiseko, nto leyo eyimfuneko ephambili ukuze kufezekiswe ukusebenza okuphezulu kwe-EP.
Imizekelo yeSicelo esiPhambili
•
Iinkqubo eziPhambili– Ukuhanjiswa kweegesi eziphendulayo ezicocekileyo kakhulu ukuze kufakwe i-etching, i-CVD, i-ion implantation, kunye ne-lithography.
•
Iigesi ezikhethekileyo– Ukuphathwa ngokukhuselekileyo kweegesi ezinokutsha, ezinobuthi, okanye ezirhabaxa ezifana neSiH₄, PH₃, Cl₂, kunye neBCl₃. Kwiigesi ezinobungozi kakhulu, kusetyenziswa imibhobho ye-EP equlathe kabini (ityhubhu yangaphakathi yegesi, ijakethi yangaphandle ikhutshwe okanye ihlanjululwe nge-nitrogen ukuze kujongwe ukuvuza).
•
Izixhobo ezibalulekileyo– Isetyenziswa kwiiphaneli zokusasazwa kwegesi (ii-VMB), iikhabhathi zegesi, kunye nee-process tool hooks apho iindawo zangaphakathi ezicocekileyo kakhulu ziyimfuneko.
Ngaphaya kweTubing: Ezinye izinto ezibalulekileyo kwiNkqubo epheleleyo ye-UHP
Ukuqinisekisa ukuthembeka okupheleleyo, inkqubo kufuneka iquke:
•
Ukuwelda kwe-Orbital okuZenzekelayo Ngokupheleleyo– Yenziwa kwi-ISO Class 5 (Class 100) okanye kwiindawo zokucoca ezingcono, nto leyo esusa umahluko wokuwelda ngesandla kunye neengozi zongcoliseko.
•
Izixhobo zoSeal zoBuso zentsimbi yonke– Ezifana neentlobo ze-VCR® okanye ze-W Seal, ezixhomekeke kwii-gaskets zesinyithi ukuze zingavuzi nto.
•
Ukucoca nokuPakisha ngokuQhelekileyo– Iityhubhu ze-EP zihlala zicocwa ngamanzi acocekileyo, zomiswe, kwaye zicocwe nge-nitrogen ngaphambi kokuba zifakwe kabini kwiipakethe zegumbi elicocekileyo ukuze zigcinwe zicocekile “njengoko zithunyelwe” de zifakwe.
Ityhubhu ye-EP ayisiyombhobho nje kuphela—ngumgca wokuqala wokhuselo ekuhanjisweni kwegesi ye-semiconductor. Umphezulu wayo ogudileyo kakhulu, ukumelana nokugqwala okuphezulu, kunye nobunyulu bezinto eziphezulu zichaphazela ngokuthe ngqo imveliso ye-wafer, ukuthembeka kwesixhobo, kunye nenzuzo iyonke. Kwihlabathi lee-nodes ezingaphantsi kwe-5nm kunye nohlahlo-lwabiwo mali oluqinileyo, ityhubhu ye-EP ayisiyonto yokuzikhethela—isisiseko.
Ixesha lokuthumela: Agasti-05-2026